Direct Operated 3 / 4 / 5 Port Solenoid Valve

・Direct operated solenoid valve ・Metal seal main valve construction ・Possible to use with a pressure of 0 MPa or more. ・Multiple pressure supply is possible. ・Manifold type No.: VVS310，VVS311 Model Flow characteristics A→E C［dm3/（s・bar）］ Flow characteristics A→E b Flow characteristics A→E Cv Power consumption (W) VS3115 3.6 0.34 0.88 5.5 VS3110 3.6 0.18 0.82 5.5 VS3135 9.0 0.3 2.4 13.2 VS3145 15 0.46 4.5 24.0

・Direct operated solenoid valve ・Possible to use with a pressure of 0 MPa or more. ・Metal seal main valve construction ・Manifold type No.: VVS410，VVS411 Model Flow characteristics A/B→EA/EB C［dm3/（s・bar）］ Flow characteristics A/B→EA/EB b Flow characteristics A/B→EA/EB Cv Applicable cylinder size Power consumption (W) VS4□10 3.9 0.35 1.0 φ80 5.5

・Direct operated solenoid valve ・Universal porting ・Available in vacuum applications ・Manifold type No.: VV317，VVT340，VVT341 Model Flow characteristics 2→3（A→R） C［dm3/（s・bar）］ Flow characteristics 2→3（A→R） b Flow characteristics 2→3（A→R） Cv Power consumption (W) Available in vacuum applications VT317 2.6 0.34 0.67 6.0 －101.2 kPa VT325 6.1 0.37 1.6 12 －101.2 kPa

・Low power consumption type: 1.8 W ・A variety of valve functions provided by a single valve 　(Universal porting) ・Low ozone concentration countermeasure part 　Rubber material: HNBR is used in main valve. ・Has mounting compatibility with conventional products. ・Manifold type No.: VV307 Model Flow characteristics 2→3 (A→R) C［dm3/（s・bar）］ Flow characteristics 2→3 (A→R) b Flow characteristics 2→3 (A→R) Cv Power consumption (W) Available in vacuum applications VT307 0.71 0.25 0.17 4 (Standard) 1.8 (Energy saving type) -101.2 kPa

・Low-power consumption (2 W DC, Low wattage type) ・Possible to use with a pressure of 0 MPa or more. ・Combined mounting of the VK300 is possible. ・Manifold type No.: VV3K3 Model Flow characteristics 4/2→5/3（A/B→R1/R2） C［dm3/（s・bar）］ Flow characteristics 4/2→5/3（A/B→R1/R2） b Flow characteristics 4/2→5/3（A/B→R1/R2） Cv Power consumption (W) Applicable cylinder SIZE VK3000 0.54 0.12 0.12 4.0 φ25

・Universal porting ・Combined on the VK3000 manifold is possible. ・Available in vacuum applications ・Manifold type No.: VV3K3 Model Flow characteristics 2→3（A→R） C［dm3/（s・bar）］ Flow characteristics 2→3（A→R） b Flow characteristics 2→3（A→R） Cv Power consumption (W) Available in vacuum applications VK300 0.80 0.27 0.19 4 －101.2 kPa

・Universal porting ・Available in vacuum applications ・Manifold type No.: VV3KF3 Model Flow characteristics 2→3（A→R） C［dm3/（s・bar）］ Flow characteristics 2→3（A→R） b Flow characteristics 2→3（A→R） Cv Power consumption (W) Available in vacuum applications VKF300 0.59 0.31 0.14 4.0 －101.2 kPa

・Applicable to 0603 chip ・Response speed: 13 msec (at time of 500 mm∗)/18.5 msec (at time of 1000 　mm∗) ・Smooth workpiece removal, with no overshoot ・No need for timing adjustment of switchback between vacuum and positive 　pressure. ・No need for throttle circuit of release air. ・Suction filter: ZFC050 (Made to Order) ＊Distance from the unit to the work area

・Since the main valve has no sliding seals, non-oil specification (Made to 　Order) is available. No exhaust to the atmosphere. ・High speed, with stable response times ・Available in vacuum applications ・Manifold type No.: VV4QD12，VV4QD15 Model Flow characteristics 4/2→5/3（A/B→EA/EB） C［dm3/（s・bar）］ Flow characteristics 4/2→5/3（A/B→EA/EB） b Flow characteristics 4/2→5/3（A/B→EA/EB） Cv Applicable cylinder size Power consumption (W) VQD1000 0.27 0.28 0.07 φ25 2.0

・7 mm width compact solenoid valve manifold ・Weight of valve alone: 5 g ・Single unit specifications, base mounted manifold, body ported manifold can be 　selected. ・Manifold type No.: SS073 Model Flow characteristics C［dm3/（s・bar）］ Flow characteristics b Flow characteristics Cv Power consumption (W) Max. operating pressure: MPa S070 0.042 0.060 0.042 0.060 0.021 0.042 0.27 0.28 0.27 0.28 0.27 0.28 0.011 0.016 0.011 0.016 0.006 0.011 0.5 0.5 0.35 0.35 0.1(With power saving circuit) 0.1(With power saving circuit) 0.5 0.3 0.3 0.1 0.3 0.1

・Power consumption: 0.1 W (with power saving circuit) ・Manifold type No.: VV100-S41 Model Type Flow characteristics 2→3 C［dm3/（s・bar）］ Flow characteristics 2→3 b Flow characteristics 2→3 Cv Power consumption (W) Available in vacuum applications V100 Standard 0.037 0.11 0.008 0.35Standard 0.1(With power saving circuit) －100 kPa V100 High flow 0.076 0.07 0.016 1 －100 kPa

・Compact manifold with two 3-port valves on 1 station ・Connector (For plug-in connection) ・Individually wired valve can be added. Model Flow characteristics 2a/2b→3（E） C［dm3/（s・bar）］ Flow characteristics 2a/2b→3（E） b Power consumption (W) Available in vacuum applications VV100 0.05 0.29 0.4(Standard) 0.15(With power saving circuit) －100 kPa

・Valve, base plate, base, and fitting in one compact unit ・Innovative unit manifold ・Equipped with 6 mm width valve, V060 series Model Type Flow characteristics 2→3（A→R） Power consumption (W) Available in vacuum applications VV061 Standard High flow Effective area：0.11 mm2 Effective area：0.21 mm2 0.55(Standard) 0.23(With power saving circuit) －100 kPa