Products | SMC Corporation

Process Gas Equipment (APTech Products)

Regulators for Ultra High Purity (UHP), Back Pressure Regulator, Diaphragm Valve for Ultra High Purity, Check Valve / Vacuum Generator / Flow Switch

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Regulators for Ultra High Purity

・For wide variety of applications from semiconductor to general. ・Body material 316 SS or...
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Diaphragm Valve

For wide variety of applications from semiconductor to general.
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Check Valve / Vacuum Generator / Flow Switch

Body Material - 316L SS secondary, Connectionn Type - Face seal Tube weld,...

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