Slit Valve XGT
-+
・Suitable for use as a block disk between the load lock chamber and
　transfer chamber, or the transfer chamber and process chamber, of
　semiconductor equipment
Series Operating pressure
range (Pa)		 Fluid Gate size
(Height x Width)
(mm)		 Operating
pressure
(MPa)
XGT Atmospheric pressure
to 1 x 10-6		 Inert gas type vacuum 32 x 222
46 x 236
50 x 336		 0.45 to 0.6